MW Power Supply
1KW~100KW
915MHz & 2450MHz

Magnetron-head
715W~30KW
915MHz & 2450MHz

MW Generator
50KW
915MHz

Solid State MW Generator
1KW
2450MHz

Plasma System
Stripping / Decapsulation
Silicon etcher tool

Radical Plasma Source
1.25KW~3KW
Flange KF40 / ISO-K63

Plasma Array
2KW / 3KW
Customized

Atmospheric Plasma Source
6KW / 75KW
2450MHz / 915MHz

Down-Stream-Plasma-Source
10KW / 100KW
915MHz

Magnetrons
915Hz~5.8KHz
Customized

Waveguide Components
Isolator / Circulator / 3-Stub Tuner
AUTO Tuner / Power Splitter

Measurement Devices
Power measurement / Analyzing
Components / Leakage Meters